DRAM Arrays, Vertical Transistor Structures, and Methods of Forming Transistor Structures and DRAM Arrays

ABSTRACT

The invention includes a method of forming a semiconductor construction. Dopant is implanted into the upper surface of a monocrystalline silicon substrate. The substrate is etched to form a plurality of trenches and cross-trenches which define a plurality of pillars. After the etching, dopant is implanted within the trenches to form a source/drain region that extends less than an entirety of the trench width. The invention includes a semiconductor construction having a bit line disposed within a semiconductor substrate below a first elevation. A wordline extends elevationally upward from the first elevation and substantially orthogonal relative to the bit line. A vertical transistor structure is associated with the wordline. The transistor structure has a channel region laterally surrounded by a gate layer and is horizontally offset relative to the bit line.

RELATED PATENT DATA

This patent resulted from a continuation of U.S. patent application Ser.No. 11/015,119, filed Feb. 3, 2005.

TECHNICAL FIELD

The invention pertains to semiconductor constructions and methods offorming semiconductor constructions. In particular aspects, theinvention pertains to semiconductor constructions having one or morevertical surround gate transistor (SGT) structures and comprising one ormore buried bit lines, and pertains to methods of forming suchconstructions.

BACKGROUND OF THE INVENTION

One continuing goal of semiconductor device application is to increasethe level of device integration, or in other words to increase thedensity of devices across a supporting substrate. Methods for increasingthe density can include decreasing the size of individual devices and/orincreasing the packing density of the devices (i.e. reducing the amountof space between adjacent devices). In order to develop higher levels ofintegration it is desirable to develop new device constructions whichcan be utilized in semiconductor applications and to develop new methodsof fabricating semiconductor device constructions.

A relatively common semiconductor device is a memory device with adynamic random access memory (DRAM) cell being an exemplary memorydevice. A DRAM cell comprises a transistor and a memory storage devicewith a typical memory storage device being a capacitor. Modernapplications for semiconductor devices can utilize vast numbers of DRAMunit cells.

Transistor structures comprise a channel region between a pair ofsource/drain regions, and a gate configured to electrically connect thesource/drain regions to one another through the channel region. Thetransistor constructions utilized in semiconductor constructions will besupported by a semiconductor substrate. The semiconductor substrate willhave a primary surface which can be considered to define a horizontaldirection. Transistor devices can be divided amongst two broadcategories based upon the orientations of the channel regions relativeto the primary surface of the semiconductor substrate. Specifically,transistor structures which have channel regions that are primarilyparallel to the primary surface of the substrate are referred to asplanar transistor structures, and those having channel regions which aregenerally perpendicular to the primary surface of the substrate arereferred to as vertical transistor structures. Since current flowbetween the source and drain regions of a transistor device occursthrough the channel region, planar transistor devices can bedistinguished from vertical transistor devices based upon the directionof current flow as well as on the general orientation of the channelregion. Specifically, vertical transistor devices are devices in whichthe current flow between the source and drain regions of the devices isprimarily substantially orthogonal to a primary surface of asemiconductor substrate, and planar transistor devices are devices inwhich the current flow between source and drain regions is primarilyparallel to the primary surface of the semiconductor substrate.

There is continuing interest in the development of methodologies bywhich vertical transistor devices can be incorporated into integratedcircuitry applications due to, among other things, advantages in packingdensity that can be obtained utilizing vertical transistor devicesrelative to planar transistor devices. Vertical transistors can alsohelp alleviate problems associates with leakage current.

Leakage current can be a significant concern and problem in low voltageand low power battery operated circuits and systems and particularly inDRAMs. Where low voltages are used for low power operation there can bea problem with threshold voltages and stand by leakage current. Smallthreshold voltage magnitudes are utilized to achieve significantoverdrive and reasonable switching speeds but can result in largesub-threshold leakage current. Various device structures have beendeveloped to provide some improvement in sub-threshold leakage currentcharacteristics. Many of the developed structures, including verticaltransistor structures which can reduce leakage current can becomplicated and/or expensive to produce. Difficulties are frequentlyencountered in attempting to produce the vast arrays of verticaltransistor devices desired for semiconductor applications whilemaintaining suitable performance characteristics of the devices. Itwould therefore be desirable to develop new semiconductor deviceconstructions applicable for utilization in DRAM structures and todevelop new methods for fabricating vertical transistors and DRAMstructures.

SUMMARY OF THE INVENTION

In one aspect, the invention encompasses a method of forming a memoryarray. A semiconductor substrate is provided having a monocrystallinesilicon upper surface. Dopant is implanted into the upper surface and aplurality of trenches and a plurality of cross-trenches are etched intothe monocrystalline silicon. The cross-trenches are substantiallyparallel relative to each other and substantially orthogonal relative tothe trenches. The trenches and cross-trenches define a plurality ofpillars, each of the pillars having a first lateral sidewallintersecting a base surface of a first trench and an opposing secondlateral sidewall which intersects a base surface of a second trench. Asecond dopant is implanted into a base surface of each of the trenchesto form a single source/drain region within each trench. Thesource/drain region extends across the base surface from the firstlateral sidewall intersection less than an entirety of a trench width. Alayer of gate material is provided around each of the pillars, and thetrenches and cross-trenches are filled with an electrically insulativematerial. At least some of the electrically insulative material withinthe cross-trenches is replaced with a conductive material.

In one aspect the invention encompasses a method of forming a verticaltransistor. A substrate is provided which has a doped upper regioncontaining a first dopant. A pillar is formed having a vertical channelregion beneath an upper source/drain region which contains the firstdopant. After forming the pillar a second dopant is implanted into thesubstrate adjacent a bottom of the pillar to form a lower source/drainregion.

In one aspect the invention encompasses a semiconductor constructionhaving a bit line disposed within a semiconductor substrate below afirst elevation. A wordline is disposed over the substrate which extendselevationally upward from the first elevation and which is substantiallyorthogonal relative to the bit line. A vertical transistor structure isassociated with the wordline, the transistor structure having a channelregion which is laterally surrounded by a gate layer. The verticaltransistor structure has a plurality of sides including a first side andan opposing second side. The gate layer overlaps the bit line on thefirst side of the vertical transistor structure. A source/drain regionis integral with the bit line and is associated with the first side ofthe transistor structure. The semiconductor construction has an absenceof any source/drain region associated with the second side of thetransistor structure.

In one aspect the invention encompasses a memory array having aplurality of substantially parallel bit lines beneath a horizontalelevation of substrate. A plurality of memory cells, each comprising avertical transistor structure which extends vertically from thehorizontal elevation of the substrate, are present in the memory array.Each vertical transistor structure includes a channel region havingvertical sidewalls with a gate electrode being disposed along thevertical sidewalls. A drain region is present within a verticallyuppermost portion of the channel region and a source region is disposedvertically below the horizontal elevation. The source region is integralwith one of the bit lines and is disposed along a first side of thevertical transistor structure. An opposing second side of eachtransistor structure lacks an associated source/drain region. The memoryarray includes a plurality of wordlines which extend orthogonal relativeto the plurality of bit lines.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is a diagrammatic three dimensional view of a fragment of asemiconductor wafer construction illustrating a plurality of verticalsurround gate transistor structures formed over a plurality of bit linesin accordance with an exemplary aspect of the present invention.

FIG. 2 is a fragmentary cross-sectional side view of a semiconductorconstruction at a preliminary processing stage of an exemplary aspect ofthe present invention.

FIGS. 3-4 are a fragmentary cross-sectional side view and a fragmentarytop view of a semiconductor construction shown at a processing stagesubsequent to that of FIG. 2. The cross-sectional side view of FIG. 3 isalong the line 3-3 of FIG. 4.

FIGS. 5-6 are views of the FIGS. 3-4 wafer fragments respectively, shownat a processing stage subsequent to that of FIGS. 3-4. FIG. 5 is a viewalong the line 5-5 of FIG. 6.

FIGS. 7-8 are views of the fragments of FIGS. 3-4 respectively, shown ata processing stage subsequent to that of FIGS. 5-6. FIG. 7 is a view along the line 7-7 of FIG. 8.

FIGS. 9-10 are views of the fragments of FIGS. 3-4 respectively, shownat a processing stage subsequent to that of FIGS. 7-8. FIG. 9 is a viewalong the line 9-9 of FIG. 10.

FIGS. 11-12 are views of the fragments of FIGS. 3-4 respectively, shownat a processing stage subsequent to that of FIGS. 9-10. FIG. 11 is aview along the line 11-11 of FIG. 12.

FIGS. 13-14 are views of the fragments of FIGS. 3-4 respectively, shownat a processing stage subsequent to that of FIGS. 11-12. FIG. 13 is aview along the line 13-13 of FIG. 14.

FIGS. 15-16 are views of the fragments of FIGS. 3-4 respectively, shownat a processing stage subsequent to that of FIGS. 13-14. FIG. 15 is aview along the line 15-15 of FIG. 16.

FIG. 17 is a view of the fragment of FIG. 4 shown at a processing stagesubsequent to that of FIG. 16.

FIG. 18 is a view of the fragment of FIG. 4 shown at a processing stagesubsequent to that of FIG. 17.

FIG. 19 is a diagrammatic view of a computer illustrating an exemplaryapplication of the present invention.

FIG. 20 is a block diagram showing particular features of themotherboard of the FIG. 19 computer.

FIG. 21 is a high-level block diagram of an electronic system accordingto an exemplary aspect of the present invention.

FIG. 22 is a simplified block diagram of an exemplary memory deviceaccording to an aspect of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This disclosure of the invention is submitted in furtherance of theconstitutional purposes of the U.S. Patent Laws “to promote the progressof science and useful arts” (Article 1, Section 8).

In particular aspects the invention encompasses dynamic random accessmemory (DRAM) arrays comprising buried bit lines and vertical surroundgate transistors (SGT) which extend partially over the buried bit lines.An exemplary construction 10 is described with references to FIG. 1.Construction 10 comprises a base 12 which can comprise, consistessentially of or consist of appropriately-doped monocrystallinesilicon. Base 12 can be referenced to as a semiconductor substrate inthe discussion that follows. Alternatively, the term “substrate” can beutilized to refer to combinations of structures such as, for example,combinations of other structures of construction 10 with base 12. To aidin interpretation of the claims that follow, the terms “semiconductivesubstrate” and “semiconductor substrate” are defined to mean anyconstruction comprising semiconductive material, including, but notlimited to, bulk semiconductive materials such as a semiconductive wafer(either alone or in assemblies comprising other materials thereon), andsemiconductive material layers (either alone or in assemblies comprisingother materials). The term “substrate” refers to any supportingstructure, including, but not limited to, the semiconductive substratesdescribed above.

A plurality of vertically-extending pillars 14, 16 and 21 are shownextending vertically upward from base 12. It is noted that relativeelevational relationships are utilized to describe the locations ofvarious features to one another (e.g., upward, downward, etc areutilized) within this disclosure. It is to be understood that such termsare used to express relative relations between the components only, andnot to indicate a relationship of the components relative to an externalframe of reference. Thus, for example, a feature described herein asprojecting upwardly relative to another feature may in fact appear toextend downwardly to a viewer in an external frame of reference relativeto the feature.

Vertical pillars can comprise semiconductor material and preferablycomprise the monocrystalline silicon of base 12. Each of pillars 14, 16,and 21 are shown to comprise a vertically-extending channel region 27and an n-type doped region 15, 17 and 25. Pillars 14, 16, and 21correspondingly comprise upper surfaces 18, 20 and 23, with such uppersurfaces alternatively being described as upper surfaces of conductivelydoped regions 15, 17 and 25. Additional upper surfaces 118, 120 and 123are shown corresponding to upper surfaces of doped regions of a secondplurality of vertically extending pillars comprised by construction 10.The n-type doped regions can correspond to source/drain regions and inparticular embodiments will each be a drain region. Although the showndopant type of the source/drain regions 15, 17 and 25 are n-type, it isto be understood that the dopant can alternatively be p-type in otheraspects of the invention (not shown).

In some aspects, base 12 can be considered a semiconductor substratehaving an upper surface 22. Such surface can be described as defining ahorizontal direction. In such aspects, vertically extending pillars 14,16 and 21 can be considered to extend upwardly from horizontal uppersurface 22 of the semiconductor substrate.

As shown in FIG. 1, a dielectric material 30 extends over substrate 12and over sidewalls of pillars 14, 16 and 21, as well as sidewalls ofeach of the second plurality of vertical pillars comprised byconstruction 10. Dielectric material 30 can preferably completelysurround the sidewalls of each vertical pillar. Dielectric material 30is ultimately utilized for spacing the pillars from a gate material 32,and can comprise any suitable material formed to any suitable thickness.In order to facilitate description of the invention, a portion ofmaterial 30 is “cut away” in FIG. 1, as well as in some subsequentfigures. Material 30 can, in some instances, remain over portions or allof surface 22 (including regions 26 and 28) between adjacent wordlines.

In particular aspects, dielectric material 30 will comprise, consistessentially of, or consist of silicon dioxide formed to a thickness ofless than or equal to about 50 Å. Dielectric material 30 can be formedby, for example, atomic layer deposition or chemical vapor deposition ofan appropriate material, by thermal oxidation of exposed surfaces ofsubstrate 12 and/or vertical pillars, or a combination these methods.

A plurality of lower source/drain regions 26, 28 and 31 are providedwithin substrate 12 proximate the bottom of each of pillars 14, 16 and21, (and also proximate the bottom of pillars comprised by the secondplurality of vertical pillars), where the bottom of a pillar is definedby intersection between the pillar sidewalls and base surface 22. Ratherthan being disposed substantially centrally beneath a correspondingpillar as typical in most vertical transistors, the lower source/drainregions in accordance with the invention are offset relative to theassociated pillar. The transistor structures of the invention can bedescribed as comprising an upper source/drain region vertically over andsubstantially aligned with a channel region, and comprising a lowersource/drain region vertically separated from the upper source/drainregion, the lower source/drain region being horizontally offset relativeto the channel region (or pillar).

The lower source/drain regions 26, 28 and 31 can comprise any suitablecomposition and typically will be heavily-doped with a dopant of thesame type as utilized in upper source/drain regions 15, 17 and 25.Although lower source/drain regions 26, 28 and 31 are shown as beingn-type, it is to be understood that the invention additionallycontemplates lower source/drain regions heavily doped with p-typedopant. Conductively doped regions 26, 28 and 31 can alternatively bedescribed as being integral bit lines and source/drain regions. Theupper source/drain regions (such as, for example, regions 15, 17 and 25)are typically connected with appropriate charge-storage devices forforming a DRAM construction. In the shown embodiment, upper source/drainregions are connected with capacitor constructions 70, 71, 72, 73, 74and 75. The capacitor constructions are shown schematically and cancomprise any suitable construction.

Gate material 32 can be considered to be formed adjacent the verticalpillars. Gateline material 32 can comprise any suitable composition andtypically will comprise, consist essentially of, or consist ofconductively-doped semiconductor materials such as, for example,silicon. In particular aspects, gate material 32 can comprise, consistessentially of, or consist of conductively-doped polycrystalline siliconand/or amorphous silicon. Gate material 32 can additionally oralternatively comprise various metals and/or metal compositions.Although, gateline material 32 is shown as homogenous in composition, itis to be understood that the gate material can in some aspects (notshown) comprise two or more separate layers which differ in compositionrelative to one another.

In a preferred embodiment of the invention, gate material 32 cancompletely surround each of the vertical pillars of construction 10. Insuch embodiment, the gate material will overlie a bit line (and integralsource/drain region) around only a portion of the lateral perimeter thepillar. The invention additionally contemplates alternative structures(not shown) where material 32 is provided proximate fewer than all ofthe sidewalls of the vertical pillars. Such alternative constructionscan comprise, for example, single-, dual-, or tri-gate verticaltransistor structures.

An insulative material 34 can be provided between vertical pillars, andcan thereby separate adjacent transistor structures. Insulative material34 can be, for example, an oxide material such as silicon oxide.Insulative regions 34 can be described as being disposed over surface 22of base 12, and in the embodiment shown in FIG. 1 can be described aspartially overlapping bit lines 26, 28 and 31. Each of insulativeregions 34 can be laterally surrounded by gate material 32 and gatematerial 32 can ultimately be patterned to form wordlines 38 and 138 asshown in FIG. 1.

Alternatively described, construction 10 can be referred to ascomprising a memory array having a plurality of substantially parallelbit lines 26, 28 and 31 beneath a horizontal elevation of a substrate.The substantially parallel bit lines can be referred to as being‘buried’ bit lines. The memory array includes a plurality of memorycells where each memory cell comprises a vertical transistor structurewhich extends vertically from the horizontal elevation of the substrate.Each vertical transistor structure includes a channel region 27 havingvertical sidewalls and a gate electrode 32 along the vertical sidewalls.Gate electrode 32 is preferably separated from the vertical sidewalls ofthe channel region by insulative material 30. Each vertical transistorstructure additionally includes a corresponding drain region 15, 17, 25within a vertically uppermost portion of the channel region. A sourceregion of each vertical transistor is disposed vertically below thehorizontal elevation (26, 28 and 31). The source regions can be integralwith one of the bit lines.

As shown in FIG. 10, each transistor structure can be associated with asingle bit line such that the associated bit line is disposed partiallybeneath a first side of the transistor structure (having the electrodematerial and gate oxide disposed over the bitline along the first side).The opposing second side of each transistor structure lacks acorresponding associated bit line and source/drain region.

In the embodiment shown in FIG. 1, a plurality of wordlines includingwordlines 38 and 131 extend orthogonal relative to the plurality of bitlines. A trench 19 b spatially separates adjacent wordlines 38 and 138.Although not shown in the diagram of FIG. 1, there would typically beone or more insulative materials formed over wordlines 38 and 138, andover upper surfaces of the vertical pillars 18, 20, 23, 118, 120 and123. Adjacent vertical transistor structures within a wordline areseparated from one another by insulative regions 34.

Although construction 10 in FIG. 1 is shown as having trench 19 b asbeing an opening between wordlines 38 and 138, it is to be understoodthat an electrically insulative line (not shown) or alternativestructure can be provided to extend between wordlines 38 and 138. Insome instances, where oxide material 30 extends over surface 22 withintrench 19 b, the electrically insulative line will be formed overmaterial 30. Where an electrically insulative line is present withintrench 19 b, such can electrically isolate the wordlines from oneanother. The line can extend over surface 22 and bit lines 26, 28 and31. An appropriate material for formation of an insulative line withintrench 19 b can comprise, for example, silicon dioxide orborophosphosilicate glass (BPSG).

The wordlines 38 and 138 can be considered to comprise transistor gatestructures which gatedly connect the source/drain regions of thevertically extending pillars through the channel regions. For instance,wordline 38 can be considered to comprise a gate which gatedly connectssource/drain regions 26 and 15 to one another through channel region 27associated with pillar 14. In particular aspects, the transistor gatestructures, capacitor structures, source/drain drain regions and channelregions can be considered to comprise DRAM unit cells. For instance, thecapacitor 70 together with diffusion regions 15, 26 and 27 (associatedwith pillar 14) and transistor gate material 32 comprised by wordline 38can be considered to form a DRAM unit cell. The DRAM unit cells can beincorporated into a DRAM array which can be incorporated into anelectronic device.

The DRAM unit cells can correspond to 4F² constructions in some aspectsof the invention. In particular aspects of the invention at least aportion of a DRAM unit cell comprising a transistor gate from a wordline(such as, for example, wordline 38) together with the source/drain andchannel regions of the vertically-extending pillar surrounded by thewordline will correspond to a 4F² construction. In other words, at leasta portion of the DRAM unit cell exclusive of the capacitor willcorrespond to a 4F² construction. The capacitor may also be includedwith in the 4F² construction or in other aspects the capacitor maycomprise a configuration such that the capacitor does not fit within a4F² construction.

Although the invention is described in FIG. 1 with reference to a DRAMconstruction, it is to be understood that the invention can haveapplication to other constructions including, for example, constructionsassociated with display applications, micro-electro-mechanical systems(MEMS), matrix applications, etc.

Exemplary methodology for forming the construction of FIG. 1 isdescribed with references to FIGS. 2-18. Similar numbering will be usedto describe FIGS. 2-18 as was used in describing FIG. 1 whereappropriate.

Referring initially to FIG. 2, such illustrates a semiconductorstructure in cross-sectional view. Construction 10 comprisessemiconductor base 12 which comprises a semiconductor material.Preferably the semiconductor material of base 12 is monocrystallinesilicon and is doped with an appropriate dopant. In particularembodiments the monocrystalline silicon of base 12 is doped with ap-type dopant. An upper portion 13 of base 12 is doped to form a dopedregion which can preferably be heavily doped with an n-type dopant.Doping of the upper surface region of base 12 can comprise, for exampleimplanting a first dopant to form region 13.

Referring to FIG. 3, substrate 12 is etched to form a plurality oftrenches 19 a and a plurality of pillars 14 and 16. Trenches 19 acomprise base surfaces 22 disposed between adjacent pillars. The pillarsshown in FIG. 3 can be referred to as a first pillar 14 and a secondpillar 16. First pillar 14 comprises opposing lateral sidewalls 40 and41 and an upper surface 18. The uppermost portion 15 of pillar 14 whichis doped with the first dopant can be referred to as a doped region, orsource/drain region. The lateral sidewalls can be described asintersecting base surface 22, where first lateral sidewall 40 intersectsbase 22 within a first trench, and opposing second lateral sidewallintersects base surface 22 within a second trench. Second pillar 16similarly comprises opposing lateral sidewalls 40 and 41 and anuppermost region 17 which has a doped upper surface 20.

Referring to FIG. 4, such shows a top view of the structure depicted inFIG. 3. During the etching of the substrate discussed above, trenches 19a are formed to be substantially parallel with respect to each other. Aplurality of cross-trenches 19 b is additionally formed during theetching step such that the cross-trenches are substantially orthogonalrelative to trenches 19 a. Accordingly, each of pillars 14, 16, 114 and116 have lateral sidewalls 40, 41, 42 and 43 defined by the etchedtrenches and cross-trenches. Each of the pillars can be described ashaving a first sidewall 40 and an opposing second sidewall 41; and ashaving a front sidewall 42 and an opposing back sidewall 43.

Formation of trenches 19 a and cross-trenches 19 b exposes base surface22 at the base of each trench and between adjacent pillars. For purposesof the present description, base surface 22 can be referred to as beingdisposed at and defining a horizontal elevation of the substrate.Accordingly, each of the pillars can be described as extendingvertically upward from the horizontal elevation.

Referring next to FIGS. 5-6, a layer of masking material 24 is formedover the pillars and within trenches 19 a and 19 b, and is subsequentlypatterned to expose a first portion of base surface 22 within each oftrenches 19 a. As shown in FIGS. 5 and 6, such patterning canadditionally expose a portion of each of the pillars. Preferably suchpatterning retains a portion of material 24 over at least a portion ofeach of the vertical pillars and blocks a second portion of surface 22within each of the trenches 19 a. In other words, after patterning maskmaterial 24 a first side of each conductive pillar and the adjacentsubstrate material within a first trench is covered, while a second sideof each pillar and the substrate material adjacent the second sidewithin a second trench is exposed. In FIG. 6, the covered portion ofeach of pillars 14, 16, 114 and 116 are shown in dashed views.Appropriate materials and methodology to achieve the described patternedmask are known to those skilled in the art.

Referring next to FIGS. 7 and 8, a second dopant is implanted into theexposed regions of each of trenches 19 a and the masking material (24 ofFIGS. 5 and 6) is removed. A appropriate anneal can be performed afterimplanting the second dopant, either at the stage of processing shown inFIGS. 7 and 8, or at a subsequent processing stage. The implanted dopantforms doped regions 26 and 28 within base material 12 with such dopedregions being beneath horizontal elevation defined by surface 22. Dopedregions 26 and 28 can be described as being lower source/drain regionsassociated with corresponding pillars 14 and 16 and also as being bitlines having integral source/drain regions along trenches 19 a. The bitlines extend less than an entirely of the width of the trenches due tothe presence of the patterned mask during implanting. The part oftrenches 19 a which is protected during the implanting of the seconddopant preferably remains substantially free of the second dopant.

Each of pillars 14 and 16 comprises a channel region disposedintermediate horizontal elevation 22 and an upper doped region 15, 17corresponding to an upper source/drain region. In particularembodiments, lower source/drain regions 26 will be source regions whichare vertically separated from drain regions 15 and 17 by channel regions27.

As shown in FIG. 8, integral bit line source/drain regions 26 and 28 areformed to be substantially parallel relative to each other, and to eachbe disposed along one side of a plurality of pillars. Accordingly, thebit lines are disposed substantially orthogonal relative tocross-trenches 19 b. Preferably, source/drain regions 26 and 28 areformed to extend partially along front side 42 and partially along backside 43 of each pillar, but do not extend the entire width of thepillar. Each of the vertical pillars is associated with a single bitline along one side 41 and can therefore be described as having anabsence of source/drain region and/or bit line on an opposing side 40 ofthe pillar.

Referring next to FIGS. 9-10, after formation of the bit lines andassociated source/drain regions, a dielectric material 30 is formed overthe substrate and over at least a portion of the vertical sidewalls ofeach of the pillars. Dielectric material 30 can be formed by, forexample, atomic layer deposition or chemical vapor deposition of anappropriate material (described above) or can be formed by thermaloxidation of exposed surfaces of substrate 12 and the vertical pillars.

In particular aspects, dielectric material 30 will be provided tocompletely surround each of the pillars for utilization as a gate oxidein vertical transistor structures having surrounding gates. A firstportion of the gate oxide adjacent a given pillar can overlap the bitline on one side of the transistor structure. A second portion of thegate oxide adjacent an opposing side of the given pillar can overlie aportion of surface 22 which is substantially free of the second dopant(along the side of the pillar opposing the bit line). The oxide material30 can, in some aspects overlie the bitline along a portion of the frontside and/or a portion of the back side of the pillar. Referring to FIG.10, such shows a portion of material 30 cut away to allow visualizationof underlying features, as discussed above. It is to be understood thatthe dielectric material can cover a portion or all of the surfaceregions (22, 26, 28) between transistor devices. In addition to thedepicted surrounding gate transistor structures, the inventioncontemplates adaptation for utilization of single gated, dual gated ortri-gated vertical transistor structures.

Referring next to FIGS. 11-12, after formation of the gate oxides 30, agate layer can be formed around, and preferably completely surrounding,the entire sidewall periphery of each of vertical pillar. Formation ofthe gate layer can comprise deposition of an appropriate gate/electrodematerial over base 12 and within channels 19 a and cross channels 19 b,followed by a directional etch. In particular embodiments of theinvention, material 32 can preferably comprise polysilicon. Alternativeor additional materials which can be utilized for gate layer 32 include,for example metallic materials including but not limited to aluminum andconductive metallic nitrides.

Referring to FIGS. 13-14, after formation of surrounding gate material32, structure 10 is completely filled with a dielectric material 34.Material 34 can comprise an oxide material such as, for example, siliconoxide.

Referring to FIGS. 15 and 16, oxide material 34 can be planarized by,for example, chemical mechanical polishing (CMP). Such planarization canpreferably expose upper surfaces 18, 20, 118 and 120 of thecorresponding pillars comprised by each device structure. As shown inFIG. 15, a transistor device structure comprising a single pillar, theassociated gate oxide and the associated surrounding gate can be formedsuch that the surrounding gate overlaps a bit line on one side of thedevice and does not overlap a bit line on an opposing side of thedevice. Oxide material 34 can also overlap a portion of a bit linebetween adjacent transistor devices.

Referring next to FIG. 17, openings are formed into oxide material 34 byremoval of at least some of the oxide material from within cross-trenchregions 19 b. Oxide removal can be achieved by any appropriate methodsuch as, for example, masking and etching techniques. Such openings canbe substantially orthogonal relative to the plurality of bit lines.Although such openings can be formed to expose an upper surface of thebit lines, the formation of openings preferably leaves a thin layer ofinsulative oxide material (i.e. material 30) over upper surface of thebit lines and base surface 22. As shown in FIG. 17, formation ofopenings within the oxide material can expose surrounding gateelectrodes 32 along the front and back sides of each of the conductivepillars while retaining oxide regions 34 between the first side of aparticular pillar (i.e. pillar 14) and a second side of an adjacentpillar (i.e. pillar 16).

Referring to FIG. 18, additional gate material 32 and/or one or morealternative material (not shown) can be deposited within the openingswithin material 34 in place of at least some of the material 34 removedduring opening formation. Exemplary alternative materials can includefor example, polysilicon or metallic materials including but not limitedto aluminum and/or conductive nitrides. The deposited additional gatematerial can be directionally etched to form wordlines 38 and 138 whichrun substantially orthogonal relative to the buried bit lines. Each ofwordlines 38 and 138 can be described as comprising transistorstructures having vertical pillars which are offset relative to buriedbit lines. Each transistor structure comprises a vertical channel regionassociated with a single bit line. The resulting vertical transistordevice structure can be produced such that the offset bit lineassociated with the transistor structure is in electrical communicationwith a first side of the device while a second side of the device is notdisposed over a bit line or source/drain region.

Constructions in accordance with the invention can be advantageous sincethe described structures and vertical transistors can be formed withoutepitaxial growth of the vertical pillars. Since epitaxial growth can bedifficult and/or expensive, the described formation of etched siliconpillars can allow production of vertical transistors withoutprohibitively expensive or problematic processing. This processing canallow cost effective production of SGTs for enhanced or maximization ofcontrol of the channel region and alleviation of current leakageproblems.

FIG. 19 illustrates generally, by way of example but not by way oflimitation, an embodiment of a computer system 400 according to anaspect of the present invention. Computer system 400 includes a monitor401 or other communication output device, a keyboard 402 or othercommunication input device, and a motherboard 404. Motherboard 404 cancarry a microprocessor 406 or other data processing unit, and at leastone memory device 408. Memory device 408 can comprise various aspects ofthe invention described above. Memory device 408 can comprise an arrayof memory cells, and such array can be coupled with addressing circuitryfor accessing individual memory cells in the array. Further, the memorycell array can be coupled to a read circuit for reading data from thememory cells. The addressing and read circuitry can be utilized forconveying information between memory device 408 and processor 406. Suchis illustrated in the block diagram of the motherboard 404 shown in FIG.20. In such block diagram, the addressing circuitry is illustrated as410 and the read circuitry is illustrated as 412. Various components ofcomputer system 400, including processor 406, can comprise one or moreof the memory constructions described previously in this disclosure.

Processor device 406 can correspond to a processor module, andassociated memory utilized with the module can comprise teachings of thepresent invention.

Memory device 408 can correspond to a memory module. For example, singlein-line memory modules (SIMMs) and dual in-line memory modules (DIMMs)may be used in the implementation which utilize the teachings of thepresent invention. The memory device can be incorporated into any of avariety of designs which provide different methods of reading from andwriting to memory cells of the device. One such method is the page modeoperation. Page mode operations in a DRAM are defined by the method ofaccessing a row of a memory cell arrays and randomly accessing differentcolumns of the array. Data stored at the row and column intersection canbe read and output while that column is accessed.

An alternate type of device is the extended data output (EDO) memorywhich allows data stored at a memory array address to be available asoutput after the addressed column has been closed. This memory canincrease some communication speeds by allowing shorter access signalswithout reducing the time in which memory output data is available on amemory bus. Other alternative types of devices include SDRAM, DDR SDRAM,SLDRAM, VRAM and Direct RDRAM, as well as others such as SRAM or Flashmemories.

Memory device 408 can comprise memory formed in accordance with one ormore aspects of the present invention.

FIG. 21 illustrates a simplified block diagram of a high-levelorganization of various embodiments of an exemplary electronic system700 of the present invention. System 700 can correspond to, for example,a computer system, a process control system, or any other system thatemploys a processor and associated memory. Electronic system 700 hasfunctional elements, including a processor or arithmetic/logic unit(ALU) 702, a control unit 704, a memory device unit 706 and aninput/output (I/O) device 708. Generally, electronic system 700 willhave a native set of instructions that specify operations to beperformed on data by the processor 702 and other interactions betweenthe processor 702, the memory device unit 706 and the I/O devices 708.The control unit 704 coordinates all operations of the processor 702,the memory device 706 and the I/O devices 708 by continuously cyclingthrough a set of operations that cause instructions to be fetched fromthe memory device 706 and executed. In various embodiments, the memorydevice 706 includes, but is not limited to, random access memory (RAM)devices, read-only memory (ROM) devices, and peripheral devices such asa floppy disk drive and a compact disk CD-ROM drive. One of ordinaryskill in the art will understand, upon reading and comprehending thisdisclosure, that any of the illustrated electrical components arecapable of being fabricated to include memory constructions inaccordance with various aspects of the present invention.

FIG. 22 is a simplified block diagram of a high-level organization ofvarious embodiments of an exemplary electronic system 800. The system800 includes a memory device 802 that has an array of memory cells 804,address decoder 806, row access circuitry 808, column access circuitry810, read/write control circuitry 812 for controlling operations, andinput/output circuitry 814. The memory device 802 further includes powercircuitry 816, and sensors 820, such as current sensors for determiningwhether a memory cell is in a low-threshold conducting state or in ahigh-threshold non-conducting state. The illustrated power circuitry 816includes power supply circuitry 880, circuitry 882 for providing areference voltage, circuitry 884 for providing the first wordline withpulses, circuitry 886 for providing the second wordline with pulses, andcircuitry 888 for providing the bit line with pulses. The system 800also includes a processor 822, or memory controller for memoryaccessing.

The memory device 802 receives control signals from the processor 822over wiring or metallization lines. The memory device 802 is used tostore data which is accessed via I/O lines. It will be appreciated bythose skilled in the art that additional circuitry and control signalscan be provided, and that the memory device 802 has been simplified tohelp focus on the invention. At least one of the processor 822 or memorydevice 802 can include a memory construction of the type describedpreviously in this disclosure.

The various illustrated systems of this disclosure are intended toprovide a general understanding of various applications for thecircuitry and structures of the present invention, and are not intendedto serve as a complete description of all the elements and features ofan electronic system using memory cells in accordance with aspects ofthe present invention. One of the ordinary skill in the art willunderstand that the various electronic systems can be fabricated insingle-package processing units, or even on a single semiconductor chip,in order to reduce the communication time between the processor and thememory device(s).

Applications for memory cells can include electronic systems for use inmemory modules, device drivers, power modules, communication modems,processor modules, and application-specific modules, and may includemultilayer, multi-chip modules. Such circuitry can further be asubcomponent of a variety of electronic systems, such as a clock, atelevision, a cell phone, a personal computer, an automobile, anindustrial control system, an aircraft, and others.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means hereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

1. A method of forming a semiconductor construction, comprising:providing a substrate comprising monocrystalline upper surface andhaving a doped upper region comprising the upper surface; etching thesubstrate to form a series of pillars, each of the pillars beingdisposed between a first trench and a second trench, a first side ofeach of the pillars intersecting a base surface of the first trench anda second side of each of the pillars intersecting a base surface of thesecond trench; providing a patterned masking material over thesubstrate, the patterned masking material covering the first side ofeach of the pillars and extending over a portion of the base surface ofthe first trench from the first side less than an entirety of the widthof the first trench, a portion of the base surface of the second trenchextending from the second side of the pillars being exposed; providing adopant into the exposed portion of the base surface of the second trenchto form a doped region, the masked portion of the base surface of thefirst trench remaining essentially free of the dopant; removing themasking material; and forming a gate material surrounding each pillar.2. The method of claim 1 wherein the doped region comprises asource/drain region associated with the second side of each of thepillars, the first side of each of the pillars lacking an associatedsource/drain region.
 3. The method of claim 1 wherein the doped regioncomprises a bit line.
 4. The method of claim 3 further comprisingincorporating each of the pillars into individual memory cells, each ofthe memory cells being associated with independent wordlines, thewordlines being disposed orthogonally relative to the bit line.
 5. Themethod of claim 4 wherein the bit line comprises an integral firstsource/drain region associated with each of the pillars, wherein theupper doped portion of each pillar comprises a second source/drainregion, and wherein each pillar serves as a channel region of thecorresponding memory cell.
 6. A memory array comprising: a plurality ofsubstantially parallel bit lines beneath a horizontal elevation of asubstrate, a plurality of memory cells, each memory cell comprising avertical transistor structure extending vertically from the horizontalelevation of the substrate, each of the vertical transistor structurescomprising: a channel region having vertical sidewalls; a gate electrodealong the vertical sidewalls; a drain region within avertically-uppermost portion of the channel region; and a source regiondisposed vertically below the horizontal elevation, the source regionbeing integral with one of the bit lines and disposed along a first sideof the vertical transistor structure, an opposing second side of eachtransistor structure lacking an associated source region; and aplurality of wordlines extending orthogonally relative to the pluralityof bit lines.
 7. The memory array of claim 6 wherein the gate electrodesurrounds the channel region.
 8. The memory array of claim 6 wherein theelectrode is separated from the channel region by an oxide material. 9.The memory array of claim 6 wherein the channel region comprisesmonocrystalline silicon.
 10. The memory array of claim 6 wherein thedrain region is electrically connected to a capacitor.
 11. A DRAM arraycomprising a plurality of vertical transistor devices, each of thetransistor devices comprising a vertical channel region which ishorizontally offset relative to a buried bitline such that the buriedbitline extends along a first side of the channel but does not extend toan opposing second side of the channel.